Preparation and Optimization of High Quality TiN Films

Ozlem Duyar, Ismaıl Cengız Kocum, H. Zafer Durusoy

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)519,527
Number of pages9
JournalTurk J Phys
Volume27
Publication statusPublished - 2003

Cite this

Duyar, O., Kocum, I. C., & Durusoy, H. Z. (2003). Preparation and Optimization of High Quality TiN Films. Turk J Phys, 27, 519,527.

Preparation and Optimization of High Quality TiN Films. / Duyar, Ozlem; Kocum, Ismaıl Cengız; Durusoy, H. Zafer.

In: Turk J Phys, Vol. 27, 2003, p. 519,527.

Research output: Contribution to journalArticle

Duyar, O, Kocum, IC & Durusoy, HZ 2003, 'Preparation and Optimization of High Quality TiN Films', Turk J Phys, vol. 27, pp. 519,527.
Duyar, Ozlem ; Kocum, Ismaıl Cengız ; Durusoy, H. Zafer. / Preparation and Optimization of High Quality TiN Films. In: Turk J Phys. 2003 ; Vol. 27. pp. 519,527.
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M3 - Article

VL - 27

SP - 519,527

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